Linear unit for High precision positioning
Linear drives for high-precision positioning with repeatabilities down to 250 nm
The linear unit is capable of covering a distance of 12,000 µm with a repeat accuracy of 250 nm. A stepper motor which can be turned off after the position is reached is used in this application. Thus no heat source whatsoever is located in the vicinity of the optical path. This results in extremely high temperature stability.
Suitable for vacuum applications
The drive design is suitable for use in high vacuum conditions and also at very low temperatures down to -200°C. The drive power for a 500 g load is only 4-6 watts. The drive is dynamic so that autofocus functions can also be implemented.